本发明涉及一种由四氯化硅制取三氯氢硅的方法，属于多晶硅生产领域。
采用双溶剂法，以三氯氢硅和甲醇为原料合成三甲氧基硅烷。
所述的配位试剂与苯基三氯硅烷的当量比为100~300%。
1·The method of tail gas harness of trichlorosilane synthesis furnace were introduced and compared.
介绍了治理三氯氢硅合成炉尾气的方法，并进行了比较。
2·The invention relates to the field of polysilicon production, in particular to a method for treating secondary trichlorosilane in an improved Siemens method.
本发明多晶硅生产领域，具体涉及改良西门子法中二级三氯氢硅的处理方法。
3·The invention relates to a trichlorosilane differential pressure coupling rectification system and an operation method thereof.
本发明是三氯氢硅差压耦合精馏系统及操作方法。
1·The phenylated silica gel has been prepared by the reaction between the surface hydroxyl groups of silica gel and phenyl trichlorosilane.
本文利用苯基三氯硅烷和硅胶表面羟基反应制备了苯基化硅胶。